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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Using Gaussian process regression for efficient parameter reconstruction

Schneider, P-I., Hammerschmidt, M., Zschiedrich, L. (JCMwave GmbH, Bolivarallee 22, D– 14 050 Berlin, Germany) and Burger, S.

computational metrology, optical metrology, computational lithography, Bayesian optimization,machine learning, finite-element methods, nanooptics

Document typeProceeding
Journal title / SourceMetrology, Inspection, and Process Control for Microlithography XXXIII
Page numbers / Article number1095911
Publisher's nameSPIE
Publication date 2019-03-26
Conference nameMetrology, Inspection, and Process Control for Microlithography XXXIII
Conference date24-02-2019 to 28-02-2019
Conference placeSan Jose, USA
Web URLhttps://arxiv.org/abs/1903.12128

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