Challenges in nanometrology: high precision measurement of position and size
Bosse Harald, Bodermann Bernd, Dai Gaoliang, Flügge Jens, Frase Carl Georg, Häßler-Grohn Wolfgang, Köchert Paul, Köning Rainer, Weichert Christophtraceability, measurement uncertainty, New SI, interferometry, line scale length encoder, straightness, photomask, CD metrology, signal modeling, reference
Document type | Proceedings |
Journal title / Source | |
Publication date | 2015 |
Conference name | 58th IWK Ilmenau Scientific Colloquium |
Conference date | 12 September 2014 |
Conference place | Ilmenau, Germany |
DOI | 10.1515/teme-2015-0002 |