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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Challenges in nanometrology: high precision measurement of position and size

Bosse, Harald, Bodermann, Bernd, Dai, Gaoliang, Flügge, Jens, Frase, Carl Georg, Häßler-Grohn, Wolfgang, Köchert, Paul, Köning, Rainer and Weichert, Christoph
Keywords:

traceability, measurement uncertainty, New SI, interferometry, line scale length encoder, straightness, photomask, CD metrology, signal modeling, reference

Document typeProceeding
Publication date 2015
Conference name58th IWK Ilmenau Scientific Colloquium
Conference date12 September 2014
Conference placeIlmenau, Germany
DOI10.1515/teme-2015-0002

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