Trinano N100 3D Measurements with Nanometer Repeatability and Effects of Probe-Surface Interaction

Bos E., Moers A., van Riel M.
Document type Proceedings
Journal title / Source Proceedings of the 27th Annual Meeting of the American Society for Precision Engineering
Volume 54
Page numbers / Article number 85-88
Publication date 2012
Conference name 27th Annual Meeting of the American Society for Precision Engineering
Conference date 21 - 26 October 2012
Conference place San Diego, CA USA
ISBN 978-1-887706-61-2

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