Welcome to the EURAMET Repository Link

The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Joint Research on Scatterometry and AFM Wafer Metrology

Bodermann, B., Buhr, E., Danzebrink, H.-U., Bär, M., Scholze, F., Krumrey, M., Wurm, M., Klapetek, P., Hansen, P.-E., Korpelainen, V., van Veghel, M., Yacoot, A., Siitonen, S., El Gawhary, O., Burger, S. and Saastamoinen, T.

Scatterometry, CD metrology, AFM, reference standard, rigorous modelling, inverse diffraction problem

Document typeProceeding
Journal title / SourceAIP Conference Proceedings
Issue319 (2011)
Publisher's nameAmerican Institute of Physics
Publication date 2011-11-10
Conference nameInternational Conference on Frontiers of Characterisation and Metrology for Nanoelectronics FCMN 2011
Conference date23-26 May 2011
Conference placeGrenoble, France

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