Traceable low-current measurements for a novel ionization gauge suitable as reference standard
Bernien M., Götz M., Illgen C., Drung D., Krause C., Bock T., Jousten K.Ionization vacuum gaugeSensitivityLow currentTraceable measurementsMetrology
Document type | Article |
Journal title / Source | Measurement: Sensors |
Volume | 18 |
Issue | December 2 |
Page numbers / Article number | 100202 |
Publisher's name | Elsevier Ltd |
Publication date | 2021 |
ISSN | 2665-9174 |
DOI | 10.1016/j.measen.2021.100202 |
Language | English |