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Mode analysis for long, undamped cantilevers with added diamond tips of varying length for fast roughness measurements

Behle, H. and Brand, U.

FEM, Mode analysis, diamond tips, piezoresistive Si-cantilever, roughness measurements

Document typeProceeding
Journal title / SourceSMSI 2020 - Sensors and Instrumentation
VolumeChapter P2
Page numbers / Article number238-239
Publisher's nameAMA Association for Sensors and Measurement
Publication date 2020-06
Conference nameSMSI 2020
Conference date22-06-2020 to 25-06-2020
Conference placeNuremberg, Germany
Persistent Identifierhttps://www.ama-science.org/proceedings/details/3729

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