A hybrid 2D/3D inspection concept with smart routing optimisation for high throughput, high dynamic range and traceable critical dimension metrology

Barlow C., Jones C.W., O’Connor D
Keywords:

dimensional metrology, surface topography, hybrid measurement, high dynamic range, process control, inline measurement, calibration

Document type Article
Journal title / Source Measurement Science and Technology
Volume 29
Issue 7
Page numbers / Article number 074004
Publisher's name IOP Publishing
Publication date 2018-5-23
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/aababd
Web URL http://iopscience.iop.org/article/10.1088/1361-6501/aababd/meta
Language English

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