A hybrid 2D/3D inspection concept with smart routing optimisation for high throughput, high dynamic range and traceable critical dimension metrology
Jones, C.W. and O’Connor, D (National Physical Laboratory, Teddington, United Kingdom)dimensional metrology, surface topography, hybrid measurement, high dynamic range, process control, inline measurement, calibration
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 29 |
| Issue | 7 |
| Page numbers / Article number | 074004 |
| Publisher's name | IOP Publishing |
| Publication date | 2018-05-23 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/aababd |
| Web URL | http://iopscience.iop.org/article/10.1088/1361-6501/aababd/meta |
| Language | English |