Comparison of alignment errors in asphere metrology between an interferometric null-test measurement and a non-null measurement with the Tilted-Wave-Interferometer

Baer G., Schindler J., Pruss C., Osten W.
Document type Proceedings
Journal title / Source Proceedings to SPIE Optifab 2013
Publication date 2013
Conference name SPIE Optifab 2013
Conference date 14 - 17 October 2013
Conference place Rochester, NY, USA

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