Comparison of alignment errors in asphere metrology between an interferometric null-test measurement and a non-null measurement with the Tilted-Wave-Interferometer
Baer G., Schindler J., Pruss C., Osten W.Document type | Proceedings |
Journal title / Source | Proceedings to SPIE Optifab 2013 |
Publication date | 2013 |
Conference name | SPIE Optifab 2013 |
Conference date | 14 - 17 October 2013 |
Conference place | Rochester, NY, USA |