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Measurement of aspheres and free-form surfaces with the Tilted-Wave-Interferometer

Baer, G., Schindler, J., Pruss, C. and Osten, W.
Keywords:

Metrology, Aspheres, Free-Forms, Tilted-Wave-Interferometer, Non-Null

Document typeProceeding
Journal title / SourceProceedings to 7th International Workshop on Advanced Optical Imaging and Metrology
Volume7
Publication date 2013
Conference nameFringe 7th International Workshop on Advanced Optical Imaging and Metrology
Conference date8 - 11 September 2013
Conference placeNürtingen, Germany
ISSN978-3-642-36358-0
DOI10.1007/978-3-642-36359-7
LanguageEnglish

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