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Gas modulation refractometry for high-precision assessment of pressure under non-temperature-stabilized conditions

Silander, I., Hausmaninger, T., Zelan, M. (Department of Measurement Technologies, SP Technical Research Institute of Sweden, Borås, Sweden) and Axner, O.
Keywords:

GAs modulation refractometry, Fabry Perot cavity refractometry

Document typeArticle
Journal title / SourceJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume36
Issue3
Page numbers / Article number03E105
Publisher's nameAmerican Vacuum Society
Publication date 2018-05
ISSN0734-2101, 1520-8559
DOI10.1116/1.5022244
LanguageEnglish

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