Gas modulation refractometry for high-precision assessment of pressure under non-temperature-stabilized conditions
Silander I., Hausmaninger T., Zelan M., Axner O.GAs modulation refractometry, Fabry Perot cavity refractometry
| Document type | Article |
| Journal title / Source | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films |
| Volume | 36 |
| Issue | 3 |
| Page numbers / Article number | 03E105 |
| Publisher's name | American Vacuum Society |
| Publication date | 2018-5 |
| ISSN | 0734-2101, 1520-8559 |
| DOI | 10.1116/1.5022244 |
| Language | English |