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110 GHz on-wafer measurement comparison on alumina substrate

Arz, U. (PTB, Braunschweig, Germany), Lazar, R., Doerner, R., Ohlrogge, M. and Probst, T.

Calibration, Ceramics, Probes, Metals, Substrates, Frequency measurement, Geometry, alumina, measurement standards, microwave measurement, network analysers, S-parameters devices under tests, measurement configurations, alumina calibration substrate, calibrations, probe geometry, measurement system, highly accurate multiline TRL calibration, vector network analyzer measurement, frequency 110.0 GHz, Al2O3, on-wafer, substrate

Document typeArticle
Journal title / SourceARFTG Microwave Measurement Symposium (ARFTG), 2017 Nov 28th - Dec 1st
Publisher's nameIEEE
Publication date 2018-01-15
Web URLhttps://doi.org/10.1109/ARFTG.2017.8255867

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