110 GHz on-wafer measurement comparison on alumina substrate
Arz U., Lazar R. , Doerner R. , Ohlrogge M. , Probst T.Calibration, Ceramics, Probes, Metals, Substrates, Frequency measurement, Geometry, alumina, measurement standards, microwave measurement, network analysers, S-parameters devices under tests, measurement configurations, alumina calibration substrate, calibrations, probe geometry, measurement system, highly accurate multiline TRL calibration, vector network analyzer measurement, frequency 110.0 GHz, Al2O3, on-wafer, substrate
| Document type | Article |
| Journal title / Source | ARFTG Microwave Measurement Symposium (ARFTG), 2017 Nov 28th - Dec 1st |
| Publisher's name | IEEE |
| Publication date | 2018-1-15 |
| DOI | 10.7795/EMPIR.14IND02.CA.20190403A |
| Web URL | https://doi.org/10.1109/ARFTG.2017.8255867 |
| Language | English |