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110 GHz on-wafer measurement comparison on alumina substrate

Arz, U. (PTB, Braunschweig, Germany), Lazar, R., Doerner, R., Ohlrogge, M. and Probst, T.
Keywords:

Calibration, Ceramics, Probes, Metals, Substrates, Frequency measurement, Geometry, alumina, measurement standards, microwave measurement, network analysers, S-parameters devices under tests, measurement configurations, alumina calibration substrate, calibrations, probe geometry, measurement system, highly accurate multiline TRL calibration, vector network analyzer measurement, frequency 110.0 GHz, Al2O3, on-wafer, substrate

Document typeArticle
Journal title / SourceARFTG Microwave Measurement Symposium (ARFTG), 2017 Nov 28th - Dec 1st
Publisher's nameIEEE
Publication date 2018-01-15
DOI10.7795/EMPIR.14IND02.CA.20190403A
Web URLhttps://doi.org/10.1109/ARFTG.2017.8255867
LanguageEnglish

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