Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry (Data)
contact resonance spectroscopy, layer analysis, piezoresistive, tactile cantilever, automatic gain control, phase-locked-loop
| Document type | Datasets |
| Journal title / Source | |
| Persistent Identifier | https://zenodo.org/record/4495006 |