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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

A deep etching mechanism for trenchbridging silicon nanowires

Tasdemir, Z. (KOC University, Istanbul, Turkey), Wollschläger, N. (BAM, Berlin, D), Österle, W. (BAM, Berlin, D), Leblebici, Y. (EPFL, Lausanne, CH) and Erdem Alaca, B. (KOC University, Istanbul, Turkey)

silicon nanowire, deep reactive ion etching, transmission electron microscopy, MEMS & NEMS

Document typeArticle
Journal title / SourceNanotechnology
Peer-reviewed articleYes
Volume27 (2016) 095303
Page numbers / Article number8 pp
Publisher's nameIOP Publishing Ltd.
Publisher's address (city only)London
Publication date 2016-02-8

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