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Reference-free, depth-dependent characterization of nanolayers and gradient systems with advanced grazing incidence X-ray fluorescence analysis

Honicke, P. (Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany), Detlefs, B. (CEA-LETI, 17 rue des Martyrs, 38054 Grenoble, France), Muller, M. (Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany), Darlatt, E. (Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany), Nolot, E. (CEA-LETI, 17 rue des Martyrs, 38054 Grenoble, France), Grampeix, H. (CEA-LETI, 17 rue des Martyrs, 38054 Grenoble, France) and Beckhoff, B. (Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany)
Keywords:

GIXRF, XRR, depth profiling, ultra-shallow implants, nanolaminates, tetralactam macrocycle self-assembled multilayers

Document typeArticle
Journal title / Sourcepss(a) - ALTECH Proc
Peer-reviewed articleYes
Volume212
Issue3
Page numbers / Article number523-528
Publisher's nameWiley
Publisher's address (city only)Honoken
Publication date 2015-02-5
DOI10.1002/pssa.201400204
Web URLhttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201400204/abstract
LanguageEnglish

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