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A compact new-concept ellipsometer for accurate large scale thin films measurements

Koops, RK (VSL Dutch Metrology Institute, Thijsseweg 11, 2629 JA Delft, Netherlands), Sonin, PS (VSL Dutch Metrology Institute, Thijsseweg 11, 2629 JA Delft, Netherlands), Veghel, MV (VSL Dutch Metrology Institute, Thijsseweg 11, 2629 JA Delft, Netherlands) and El Gawhary, OEG (VSL Dutch Metrology Institute, Thijsseweg 11, 2629 JA Delft, Netherlands)
Keywords:

ellipsometry, thin films, large area

Document typeArticle
Journal title / SourceJournal of Optics
Peer-reviewed articleYes
Volume16
Issue6
Publisher's nameIOP Publishing Ltd
Publication date 2014-05-8
ISSN2040-8978
DOI10.1088/2040-8978/16/6/065701
Web URLhttp://iopscience.iop.org/article/10.1088/2040-8978/16/6/065701/meta
LanguageEnglish

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