A compact new-concept ellipsometer for accurate large scale thin films measurements
Koops, RK (VSL Dutch Metrology Institute, Thijsseweg 11, 2629 JA Delft, Netherlands), Sonin, PS (VSL Dutch Metrology Institute, Thijsseweg 11, 2629 JA Delft, Netherlands), Veghel, MV (VSL Dutch Metrology Institute, Thijsseweg 11, 2629 JA Delft, Netherlands) and El Gawhary, OEG (VSL Dutch Metrology Institute, Thijsseweg 11, 2629 JA Delft, Netherlands)ellipsometry, thin films, large area
Document type | Article |
Journal title / Source | Journal of Optics |
Peer-reviewed article | Yes |
Volume | 16 |
Issue | 6 |
Publisher's name | IOP Publishing Ltd |
Publication date | 2014-05-8 |
ISSN | 2040-8978 |
DOI | 10.1088/2040-8978/16/6/065701 |
Web URL | http://iopscience.iop.org/article/10.1088/2040-8978/16/6/065701/meta |
Language | English |