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Etching of silicon surfaces using atmospheric plasma jets

Paetzelt, H. (Leibniz-Institut für Oberflächenmodifizierung), Böhm, G. (Leibniz-Institut für Oberflächenmodifizierung) and Arnold, Th. (Leibniz-Institut für Oberflächenmodifizierung)
Keywords:

plasma jet machining, plasma etching, surface roughness

Document typeArticle
Journal title / SourcePlasma Sources Science and Technology
Peer-reviewed articleYes
Volume24
Issue2
Page numbers / Article number025002
Publisher's nameIOP Publishing
Publisher's address (city only)Bristol
Publication date 2015-01-27
DOI10.1088/0963-0252/24/2/025002
LanguageEnglish

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