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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Etching of silicon surfaces using atmospheric plasma jets

Paetzelt, H. (Leibniz-Institut für Oberflächenmodifizierung), Böhm, G. (Leibniz-Institut für Oberflächenmodifizierung) and Arnold, Th. (Leibniz-Institut für Oberflächenmodifizierung)

plasma jet machining, plasma etching, surface roughness

Document typeArticle
Journal title / SourcePlasma Sources Science and Technology
Peer-reviewed articleYes
Page numbers / Article number025002
Publisher's nameIOP Publishing
Publisher's address (city only)Bristol
Publication date 2015-01-27

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