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MODELING ASPECTS TO IMPROVE THE SOLUTION OF THE INVERSE PROBLEM IN SCATTEROMETRY

Gross, H (PTB), Heidenreich, S (PTB), Henn, M-A (PTB) and Bär, M (PTB)
Keywords:

critical dimensions, uncertainty, lithography, scatterometry, inverse problem

Document typeArticle
Journal title / SourceDiscrete and Continuous Dynamical Systems Series S
Peer-reviewed articleYes
Volume8
Issue3
Page numbers / Article number497-519
Publisher's nameAmerican Institute of Mathematical Sciences
Publisher's address (city only)Springfield, MO
Publication date 2015-06
ISSN-
DOI10.3934/dcdss.2015.8.497
Web URLhttp://www.aimsciences.org/journals/displayArticlesnew.jsp?paperID=10417
LanguageEnglish

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