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Profile estimation for Pt submicron wire on rough Si substrate from experimental data

Karamehmedović, M. (Department of Process and Chemical Engineering, University of Bremen, Badgasteiner Str. 3, D-28359 Bremen, Germany), Hansen, P.-E. (Danish Fundamental Metrology, Technical University of Denmark, Matematiktorvet 307, DK-2800 Kgs. Lyngby, Denmark), Discherl, K. (Danish Fundamental Metrology, Technical University of Denmark, Matematiktorvet 307, DK-2800 Kgs. Lyngby, Denmark), Karamehmedović, E. (Faculty of Engineering and Natural Sciences, International University of Sarajevo, Hrasnička cesta 15, 71000, Sarajevo, Bosnia and Herzegovina) and Wriedt, T. (Institut für Werkstofftechnik, Badgasteiner Str. 3, D-28359 Bremen, Germany)
Document typeArticle
Journal title / SourceOPTICS EXPRESS
Peer-reviewed articleYes
Volume20
Issue19
Page numbers / Article number21678 - 21686
Publication date 2012-09-6
DOI10.1364/OE.20.021678
LanguageEnglish

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