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Alignment-free characterization of 2D gratings

Madsen, M.H (DFM A/S), Boher, P (ELDIM), Hansen, P.E (DFM A/S) and Jørgensen, J.F (Image Metrology A/S)
Document typeArticle
Journal title / SourceApplied Optics
Peer-reviewed articleYes
Page numbers / Article number317-322
Publisher's nameOSA Publishing
Publisher's address (city only)Washington
Publication date 2016-01-7
Web URLhttps://www.osapublishing.org/ao/abstract.cfm?uri=ao-55-2-317
Persistent Identifierhttps://arxiv.org/ftp/arxiv/papers/1509/1509.07623.pdf

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