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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Alignment-free characterization of 2D gratings

Madsen, M.H (DFM A/S), Boher, P (ELDIM), Hansen, P.E (DFM A/S) and Jørgensen, J.F (Image Metrology A/S)
Document typeArticle
Journal title / SourceApplied Optics
Peer-reviewed articleYes
Volume55
Issue2
Page numbers / Article number317-322
Publisher's nameOSA Publishing
Publisher's address (city only)Washington
Publication date 2016-01-7
DOI10.1364/AO.55.000317
Web URLhttps://www.osapublishing.org/ao/abstract.cfm?uri=ao-55-2-317
LanguageEnglish
Persistent Identifierhttps://arxiv.org/ftp/arxiv/papers/1509/1509.07623.pdf

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