Alignment-free characterization of 2D gratings
Madsen, M.H (DFM A/S), Boher, P (ELDIM), Hansen, P.E (DFM A/S) and Jørgensen, J.F (Image Metrology A/S)| Document type | Article |
| Journal title / Source | Applied Optics |
| Peer-reviewed article | Yes |
| Volume | 55 |
| Issue | 2 |
| Page numbers / Article number | 317-322 |
| Publisher's name | OSA Publishing |
| Publisher's address (city only) | Washington |
| Publication date | 2016-01-7 |
| DOI | 10.1364/AO.55.000317 |
| Web URL | https://www.osapublishing.org/ao/abstract.cfm?uri=ao-55-2-317 |
| Language | English |
| Persistent Identifier | https://arxiv.org/ftp/arxiv/papers/1509/1509.07623.pdf |