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Universal Equation for Argon Gas Cluster Sputtering Yields

Seah, M.P (Analytical Science Division, National Physical Laboratory, Teddington TW11 0LW, UK)
Keywords:

gold, Irganox1010, OLED, polymers, silicon, silicon dioxide.

Document typeArticle
Journal title / SourceJournal of Physical Chemistry C
Peer-reviewed articleYes
Volume117
Issue(24),
Page numbers / Article numberpp 12622–12632
Publisher's nameACS Publications
Publisher's address (city only)Washington DC
Publication date 2019-05-13
ISSN1932-7447
DOI10.1021/jp402684c
Web URLhttp://pubs.acs.org/doi/abs/10.1021/jp402684c
LanguageEnglish

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