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RF wafer probing with improved contact repeatability using nanometer positioning

Daffé, K. (IEMN-Univ-Lille1, France), Dambrine, G. (IEMN-Univ-Lille1, France), von Kleist-Retzow, F. (University of Oldenburg, Germany) and Haddadi, K. (IEMN-Univ-Lille1, France)

Probes, Standards, Frequency measurement, Radio frequency, Calibration, Microwave measurement,

Document typeProceeding
Journal title / SourceMicrowave Measurement Conference (ARFTG), 2016 87th ARFTG
Peer-reviewed articleYes
Page numbers / Article numberN/A
Publisher's nameIEEE
Publication date 2016-06-30
Conference nameMicrowave Measurement Conference (ARFTG), 2016 87th ARFTG
Conference date27-05-2016 to 27-05-2016
Conference placeSan Francisco CA USA
Web URLhttps://hal.archives-ouvertes.fr/hal-02083251/document

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