RF wafer probing with improved contact repeatability using nanometer positioning
Daffé, K. (IEMN-Univ-Lille1, France), Dambrine, G. (IEMN-Univ-Lille1, France), von Kleist-Retzow, F. (University of Oldenburg, Germany) and Haddadi, K. (IEMN-Univ-Lille1, France)Probes, Standards, Frequency measurement, Radio frequency, Calibration, Microwave measurement,
| Document type | Proceeding |
| Journal title / Source | Microwave Measurement Conference (ARFTG), 2016 87th ARFTG |
| Peer-reviewed article | Yes |
| Issue | N/A |
| Page numbers / Article number | N/A |
| Publisher's name | IEEE |
| Publication date | 2016-06-30 |
| Conference name | Microwave Measurement Conference (ARFTG), 2016 87th ARFTG |
| Conference date | 27-05-2016 to 27-05-2016 |
| Conference place | San Francisco CA USA |
| DOI | 10.1109/ARFTG.2016.7501967 |
| ISBN | 978-1-5090-1308-1 |
| Web URL | https://hal.archives-ouvertes.fr/hal-02083251/document |
| Language | English |