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RF wafer probing with improved contact repeatability using nanometer positioning

Daffé, K. (IEMN-Univ-Lille1, France), Dambrine, G. (IEMN-Univ-Lille1, France), von Kleist-Retzow, F. (University of Oldenburg, Germany) and Haddadi, K. (IEMN-Univ-Lille1, France)
Keywords:

Probes, Standards, Frequency measurement, Radio frequency, Calibration, Microwave measurement,

Document typeProceeding
Journal title / SourceMicrowave Measurement Conference (ARFTG), 2016 87th ARFTG
Peer-reviewed articleYes
IssueN/A
Page numbers / Article numberN/A
Publisher's nameIEEE
Publication date 2016-06-30
Conference nameMicrowave Measurement Conference (ARFTG), 2016 87th ARFTG
Conference date27-05-2016 to 27-05-2016
Conference placeSan Francisco CA USA
DOI10.1109/ARFTG.2016.7501967
ISBN978-1-5090-1308-1
Web URLhttps://hal.archives-ouvertes.fr/hal-02083251/document
LanguageEnglish

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