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Homogeneity Characterization of Lattice Spacing of Silicon Single Crystals

Waseda, A. W. (AIST, Tsukuba, Japan), Fujimoto, H. F. (AIST, Tsukuba, Japan), Zhang, X. Z. (KEK, Tsukuba, Japan), Kuramoto, N. K. (AIST, Tsukuba, Japan) and Fujii, K. F. (AIST, Tsukuba, Japan)
Keywords:

Avogadro constant, impurity, lattice comparator, lattice spacing, silicon single crystal

Document typeArticle
Journal title / SourceIEEE Transaction on Instrumentation and Measurement
Peer-reviewed articleYes
Volume64
Issue6
Page numbers / Article number1692-1695
Publisher's nameInstitution of Electrical and Electrical Engineering (IEEE)
Publisher's address (city only)Piscataway
Publication date 2015-01-17
ISSN0018-9456
DOI10.1109/TIM.2014.2383091
Web URLhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7004030&refinements%3D4294557292%26filter%3DAND%28p_IS_Number%3A7104190%29
LanguageEnglish
Persistent IdentifierINSPEC Accession Number: 15111465

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