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Silicon double spring for the simultaneous calibration of probing forces and deflections in the micro range

Brand, U. (PTB), Li, Z. (PTB), Gao, S. (PTB), Hahn, S. (TU Chemnitz) and Hiller, K. (TU Chemnitz)
Keywords:

double spring, probing force calibration, bending force, bending deflection, stiffness

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Peer-reviewed articleYes
Volume27
Issue2016
Page numbers / Article number015601 / 9 pp
Publisher's nameIOP Publishing Ltd.
Publisher's address (city only)UK
Publication date 2015-11-24
DOI10.1088/0957-0233/27/1/015601
LanguageEnglish

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