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PTB's enhanced stitching approach for the high-accuracy interferometric form error characterization of spheres

Bartl, Guido (PTB), Krystek, Michael (PTB) and Nicolaus, Arnold (PTB)
Keywords:

sub-aperture stitching, form error, silicon sphere, roundness, sphere interferometer

Document typeArticle
Journal title / SourceMeas. Sci. Technol.
Peer-reviewed articleYes
Volume25
Issue-
Page numbers / Article number064002 (8pp)
Publisher's nameIOP
Publisher's address (city only)UK
Publication date 2014
ISSN-
DOI10.1088/0957-0233/25/6/064002
Web URL-
LanguageEnglish

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