High precision dimensional metrology of periodic nanostructures using laser scatterometry
Bodermann, Bernd (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Bonifer, Stefanie (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Buhr, Egbert (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Diener, Alexander (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany) and Wurm, Matthias (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany)| Document type | Proceeding |
| Publication date | 2015 |
| Conference name | 10th IMEKO Symposium Laser Metrology for Precision Measurement and Inspection in Industry |
| Conference date | 12 - 13 September 2011 |
| Conference place | Braunschweig, Germany |
| ISBN | 978-3-18-092156-3 |
| Language | English |