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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

High precision dimensional metrology of periodic nanostructures using laser scatterometry

Bodermann, Bernd (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Bonifer, Stefanie (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Buhr, Egbert (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Diener, Alexander (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany) and Wurm, Matthias (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany)
Document typeProceeding
Publication date 2015
Conference name10th IMEKO Symposium Laser Metrology for Precision Measurement and Inspection in Industry
Conference date12 - 13 September 2011
Conference placeBraunschweig, Germany
ISBN978-3-18-092156-3
LanguageEnglish

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