High precision dimensional metrology of periodic nanostructures using laser scatterometry
Bodermann, Bernd (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Bonifer, Stefanie (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Buhr, Egbert (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Diener, Alexander (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany) and Wurm, Matthias (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany)Document type | Proceeding |
Publication date | 2015 |
Conference name | 10th IMEKO Symposium Laser Metrology for Precision Measurement and Inspection in Industry |
Conference date | 12 - 13 September 2011 |
Conference place | Braunschweig, Germany |
ISBN | 978-3-18-092156-3 |
Language | English |