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UV/ozone cleaning of mass standards: results on the correlation between mass and surface chemical state

Fuchs, Peter (Federal Institute of Metrology METAS), Marti, Kilian (Federal Institute of Metrology METAS), Grgic, Goran (Metrology Institute of the Republic of Slovenia MIRS) and Russi, Stefan (Federal Institute of Metrology METAS)

mass standards, XPS, UV/ozone, surface chemistry

Document typeArticle
Journal title / SourceMetrologia
Peer-reviewed articleYes
Page numbers / Article number387
Publisher's nameIOP Publishing
Publisher's address (city only)Bristol
Publication date 2014-06-25
Web URLhttp://iopscience.iop.org/article/10.1088/0026-1394/51/5/387

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