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Alternative methods for uncertainty evaluation in EUV scatterometry

Heidenreich, S (PTB), Henn, M-A (PTB), Gross, H (PTB), Bodermann, B (PTB) and Bär, M (PTB)
Keywords:

Uncertainty quanti cation, Di raction gratings, Metrology

Document typeProceeding
Journal title / SourceProc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 87890T (May 13, 2013); doi:10.1117/12.2020677
Peer-reviewed articleYes
Volume8789
Issue2013
Page numbers / Article number-
Publisher's nameInternational Society for Optics and Photonics
Publisher's address (city only)Bellingham
Publication date 2013-05-13
Conference nameModeling Aspects in Optical Metrology IV
Conference date13-05-2013
Conference placeMunich
ISSN-
DOI10.1117/12.2020677
ISBN-
Web URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1687372
LanguageEnglish

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