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Application of the metrological SPM for long distance measurements

Vorbringer-Dorozhovets, N. (TU-IL), Fuessl, R. (TU-IL) and Manske, E. (TU-IL)
Keywords:

nanopositioning and nanomeasuring machine, metrological scanning probe microscope, SPM, AFM, long distance measurements

Document typeProceeding
Journal title / SourceShaping the future by engineering : 58th IWK, Ilmenau Scientific Colloquium, Technische Universität Ilmenau, 8 - 12 September 2014 ; proceedings
Volume2014
Page numbers / Article number158
Publisher's nameTU-Ilmenau
Publication date 2015
Conference name58th Ilmenau Scientific Colloquium
Conference dateSeptember 8-12, 2014
Conference placeIlmenau, Germany
Web URLhttp://www.db-thueringen.de/servlets/DocumentServlet?id=24940
LanguageEnglish
Persistent Identifierhttp://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2014iwk-158:6

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