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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Application of the metrological SPM for long distance measurements

Vorbringer-Dorozhovets, N. (TU-IL), Fuessl, R. (TU-IL) and Manske, E. (TU-IL)

nanopositioning and nanomeasuring machine, metrological scanning probe microscope, SPM, AFM, long distance measurements

Document typeProceeding
Journal title / SourceShaping the future by engineering : 58th IWK, Ilmenau Scientific Colloquium, Technische Universität Ilmenau, 8 - 12 September 2014 ; proceedings
Page numbers / Article number158
Publisher's nameTU-Ilmenau
Publication date 2015
Conference name58th Ilmenau Scientific Colloquium
Conference dateSeptember 8-12, 2014
Conference placeIlmenau, Germany
Web URLhttp://www.db-thueringen.de/servlets/DocumentServlet?id=24940
Persistent Identifierhttp://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2014iwk-158:6

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