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Finite-element based electromagnetic field simulations: benchmark results for isolated structures

Burger, S, Zschiedrich, L, Pomplun, J and Schmidt, F
Document typeProceeding
Journal title / SourceProc. SPIE
Peer-reviewed articleYes
Volume8880
Page numbers / Article number88801Z
Publication date 2013
Conference namePhotomask Technology
Conference date2013
Conference placeMonterey, CA, USA
DOI10.1117/12.2026213
LanguageEnglish

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