Finite-element based electromagnetic field simulations: benchmark results for isolated structures
Burger, S, Zschiedrich, L, Pomplun, J and Schmidt, F| Document type | Proceeding |
| Journal title / Source | Proc. SPIE |
| Peer-reviewed article | Yes |
| Volume | 8880 |
| Page numbers / Article number | 88801Z |
| Publication date | 2013 |
| Conference name | Photomask Technology |
| Conference date | 2013 |
| Conference place | Monterey, CA, USA |
| DOI | 10.1117/12.2026213 |
| Language | English |