Finite-element based electromagnetic field simulations: benchmark results for isolated structures
Burger, S, Zschiedrich, L, Pomplun, J and Schmidt, FDocument type | Proceeding |
Journal title / Source | Proc. SPIE |
Peer-reviewed article | Yes |
Volume | 8880 |
Page numbers / Article number | 88801Z |
Publication date | 2013 |
Conference name | Photomask Technology |
Conference date | 2013 |
Conference place | Monterey, CA, USA |
DOI | 10.1117/12.2026213 |
Language | English |