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XPS depth profiling of an ultrathin bioorganic film with an argon gas cluster ion beam

Dietrich, P.M (Federal Institute for Materials Research and Testing, 12200 Berlin, Germany), Nietzold, C (Federal Institute for Materials Research and Testing, 12200 Berlin, Germany), Weise,, M (Federal Institute for Materials Research and Testing, 12200 Berlin, Germany), Unger,, W.E.S (Federal Institute for Materials Research and Testing, 12200 Berlin, Germany), Alnabulsi,, S (Physical Electronics, Inc., 17825 Lake Drive East, Chanhassen, Minnesota 55317) and Moulder, J (Physical Electronics, Inc., 17825 Lake Drive East, Chanhassen, Minnesota 55317)
Document typeArticle
Journal title / SourceBiointerphases
Peer-reviewed articleYes
Volume11
Issue2
Page numbers / Article number029603
Publisher's nameAmerican Vacuum Society
Publisher's address (city only)New Yokk
Publication date 2016-06-1
ISSN1934-8630
DOI10.1116/1.4948341
LanguageEnglish

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