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A virtual lateral standard for AFM calibraion

Koops, R. (VSL), van Veghel, M. (VSL) and van de Nes, A. (VSL)
Keywords:

Nanoscale production; Lateral AFM calibration; Virtual standard; Traceability; Measurement uncertainty; Non-linearity

Document typeArticle
Journal title / SourceMicroelectronic Engineering
Peer-reviewed articleYes
Volume153
Issue5 March 2016
Page numbers / Article numberpp 29-36
Publisher's nameElsevier
Publication date 2016-03-5
DOI10.1016/j.mee.2016.01.010
LanguageEnglish

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