Effect of different ALD Al2O3 oxidants on the surface passivation of black silicon
Repo, P. (Aalto University, Espoo, Finland) and Savin, H. (Aalto University, Espoo, Finland)black silicon; surface passivatoin; aluminum oxide
| Document type | Article |
| Journal title / Source | Energy Procedia |
| Peer-reviewed article | Yes |
| Volume | 92 |
| Issue | - |
| Page numbers / Article number | 381-385 |
| Publisher's name | Elsevier |
| Publisher's address (city only) | - |
| Publication date | 2016-08 |
| DOI | 10.1016/j.egypro.2016.07.116 |
| Web URL | http://www.sciencedirect.com/science/article/pii/S1876610216305434 |
| Language | English |