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Effect of different ALD Al2O3 oxidants on the surface passivation of black silicon

Repo, P. (Aalto University, Espoo, Finland) and Savin, H. (Aalto University, Espoo, Finland)

black silicon; surface passivatoin; aluminum oxide

Document typeArticle
Journal title / SourceEnergy Procedia
Peer-reviewed articleYes
Page numbers / Article number381-385
Publisher's nameElsevier
Publisher's address (city only)-
Publication date 2016-08
Web URLhttp://www.sciencedirect.com/science/article/pii/S1876610216305434

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