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Effect of different ALD Al2O3 oxidants on the surface passivation of black silicon

Repo, P. (Aalto University, Espoo, Finland) and Savin, H. (Aalto University, Espoo, Finland)
Keywords:

black silicon; surface passivatoin; aluminum oxide

Document typeArticle
Journal title / SourceEnergy Procedia
Peer-reviewed articleYes
Volume92
Issue-
Page numbers / Article number381-385
Publisher's nameElsevier
Publisher's address (city only)-
Publication date 2016-08
DOI10.1016/j.egypro.2016.07.116
Web URLhttp://www.sciencedirect.com/science/article/pii/S1876610216305434
LanguageEnglish

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