Welcome to the EURAMET Repository Link

The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Investigations of the influence of common approximations in scatterometry for dimensional nanometrology

Endres, J. (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Diener, A. (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany), Wurm, M. (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany) and Bodermann, B. (Physikalisch-Technische Bundesanstalt, Bundesallee 100, D-38116, Braunschweig, Germany)
Keywords:

scatterometry, nanometrology, linewidth, critical dimension, grating

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Volume25
Issue4
Publication date 2014-03-5
DOI10.1088/0957-0233/25/4/044004
Web URLhttp://iopscience.iop.org/0957-0233/25/4/044004/
LanguageEnglish

Back to the list view