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Ongoing trends in precision metrology,particularly in nanopositioning and nanomeasuring technology

Manske, E. (TU-IL), Fuessl, R. (TU-IL), Mastylo, R. (TU-IL), Vorbringer-Dorozhovets, N. (TU-IL), Birli, O. (TU-IL) and Jaeger, G. (TU-IL)
Keywords:

Nanopositioning and nanomeasuring machine, multiscale measurement, optical and tactile sensors

Document typeArticle
Journal title / Sourcetm – Technisches Messen 2015; 82(7–8): 359–366
Peer-reviewed articleYes
Volume82
Issue7-8
Page numbers / Article number359-366
Publisher's nameDe Gruyter
Publisher's address (city only)Oldenbourg
Publication date 2015
DOI10.1515/teme-2015-0011
LanguageEnglish

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