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Development of a scatterometry reference standard

Bodermann, B. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Loechel, B. (Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Albert-Einstein-Str. 15, D-12489 Berlin, Germany), Scholze, F. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Dai, G. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Wernecke, J. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Endres, J. (Physikalisch-Technische Bundesanstalt Braunschweig and Berlin, Bundesallee 100, D- 38116, Braunschweig, Germany), Probst, J. (Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Albert-Einstein-Str. 15, D-12489 Berlin, Germany), Schoengen, M. (Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Albert-Einstein-Str. 15, D-12489 Berlin, Germany), Krumrey, M. (Physikalisch-Technische Bundesanstalt Braunschweig and Berlin, Bundesallee 100, D- 38116, Braunschweig, Germany), Hansen, P.-E. (Dansk Fundamental Metrolog, Matematiktorvet 307, DK-2800 Kongens Lyngby, Denmark) and Soltwisch, V. (Physikalisch-Technische Bundesanstalt Braunschweig and Berlin, Bundesallee 100, D- 38116, Braunschweig, Germany)
Keywords:

Scatterometry, CD metrology, traceability, reference standard, tool matching, AFM, SEM, rigorous modelling

Document typeProceeding
Journal title / SourceProc SPIE
Volume9132
Publication date 2015
Conference nameSPIE Optical Micro- and Nanometrology V
Conference dateApril 14, 2014
Conference placeBrussels, Belgium
DOI10.1117/12.2052278
LanguageEnglish

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