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Smart sensors and calibration standards for high precision metrology

Brand, U. (PTB), Gao, S. (PTB), Li, Z. (PTB), XU, M. (PTB), Buetefisch, S. (PTB), Peiner, E. (TU Braunschweig), Frueauf, J. (SiMETRICS GmbH) and Hiller, K. (TU Chemnitz)
Keywords:

Calibration ; Metrology ; Smart sensors ; Silicon ; Sensors ; Microtechnology ; Dimensional metrology ; Equipment and services ; Fabrication

Document typeProceeding
Journal title / Source" Smart sensors and calibration standards for high precision metrology ", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170V (May 21, 2015); doi:10.1117/12.2179455; http://dx.doi.org/10.1117/12.2179455
Volume9517
Issue9517
Page numbers / Article number95170V
Publisher's nameSPIE
Publication date 2015-05-21
Conference nameSmart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
Conference dateMay 4, 2015
Conference placeBarelona, Spain
DOI10.1117/12.2179455
LanguageEnglish

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