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Uncertainty propagation in computationally expensive models: A survey of sampling methods and application to scatterometry

Heidenreich, S (PTB), Gross, H (PTB), Bär, M (PTB) and Wright, L (NPL)
Keywords:

smart sampling, statistical inverse problem, scatterometry

Document typeArticle
Journal title / SourceMeasurement
Peer-reviewed articleYes
Volumein press, corrected proof
Issuein press, corrected proof
Page numbers / Article number-
Publisher's nameElsevier
Publisher's address (city only)Amsterdam
Publication date 2016-06-8
ISSN-
DOI10.1016/j.measurement.2016.06.009
Web URLhttp://www.sciencedirect.com/science/article/pii/S0263224116302901
LanguageEnglish

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