Characterization of thin film thickness
Pourjamal, SP (Aalto University School of Electrical Engineering, Department of Signal Processing and Acoustics, Metrology Research Institute, Otakaari 5A, 02150 Espoo, FINLAND), Mäntynen, HM (Aalto University School of Electrical Engineering, Department of Signal Processing and Acoustics, Metrology Research Institute, Otakaari 5A, 02150 Espoo, FINLAND), Jaanson, PJ (Aalto University School of Electrical Engineering, Department of Signal Processing and Acoustics, Metrology Research Institute, Otakaari 5A, 02150 Espoo, FINLAND, Centre for Metrology and Accreditation (MIKES)), Rosu, DMR (Federal Institute for Materials Research and Testing (BAM), Unter den Eichen 87, 12205 Berlin, Germany), Hertwig, AH (Federal Institute for Materials Research and Testing (BAM), Unter den Eichen 87, 12205 Berlin, Germany), Manoocheri, FM (Aalto University School of Electrical Engineering, Department of Signal Processing and Acoustics, Metrology Research Institute, Otakaari 5A, 02150 Espoo, FINLAND, Centre for Metrology and Accreditation (MIKES)) and Ikonen, EI (Aalto University School of Electrical Engineering, Department of Signal Processing and Acoustics, Metrology Research Institute, Otakaari 5A, 02150 Espoo, FINLAND, Centre for Metrology and Accreditation (MIKES))| Document type | Article |
| Journal title / Source | Metrologia |
| Peer-reviewed article | Yes |
| Volume | 51 |
| Issue | 6 |
| Page numbers / Article number | S302-S308 |
| Publisher's name | IOP Publishing |
| Publication date | 2014-11-20 |
| ISSN | 0026-1394 |
| DOI | 10.1088/0026-1394/51/6/S302 |
| Web URL | http://iopscience.iop.org/article/10.1088/0026-1394/51/6/S302/meta |
| Language | English |