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Characterization of thin film thickness

Pourjamal, SP (Aalto University School of Electrical Engineering, Department of Signal Processing and Acoustics, Metrology Research Institute, Otakaari 5A, 02150 Espoo, FINLAND), Mäntynen, HM (Aalto University School of Electrical Engineering, Department of Signal Processing and Acoustics, Metrology Research Institute, Otakaari 5A, 02150 Espoo, FINLAND), Jaanson, PJ (Aalto University School of Electrical Engineering, Department of Signal Processing and Acoustics, Metrology Research Institute, Otakaari 5A, 02150 Espoo, FINLAND, Centre for Metrology and Accreditation (MIKES)), Rosu, DMR (Federal Institute for Materials Research and Testing (BAM), Unter den Eichen 87, 12205 Berlin, Germany), Hertwig, AH (Federal Institute for Materials Research and Testing (BAM), Unter den Eichen 87, 12205 Berlin, Germany), Manoocheri, FM (Aalto University School of Electrical Engineering, Department of Signal Processing and Acoustics, Metrology Research Institute, Otakaari 5A, 02150 Espoo, FINLAND, Centre for Metrology and Accreditation (MIKES)) and Ikonen, EI (Aalto University School of Electrical Engineering, Department of Signal Processing and Acoustics, Metrology Research Institute, Otakaari 5A, 02150 Espoo, FINLAND, Centre for Metrology and Accreditation (MIKES))
Document typeArticle
Journal title / SourceMetrologia
Peer-reviewed articleYes
Volume51
Issue6
Page numbers / Article numberS302-S308
Publisher's nameIOP Publishing
Publication date 2014-11-20
ISSN0026-1394
DOI10.1088/0026-1394/51/6/S302
Web URLhttp://iopscience.iop.org/article/10.1088/0026-1394/51/6/S302/meta
LanguageEnglish

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