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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Improved reconstruction of critical dimensions in exteme ultraviolet scatterometry by modellig systematic errors

Henn, M-A (PTB), Gross, H (PTB), Heidenreich, S (PTB), Scholze, F (PTB), Elster, C (PTB) and Bär, M (PTB)
Keywords:

Scatterometry, metrology, EUV-lithography

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Peer-reviewed articleYes
Volume25
Issue4
Page numbers / Article number044003 (9pp)
Publisher's nameIOPScience
Publisher's address (city only)Bristol & Philadelphia
Publication date 2014-03-5
ISSN-
DOI10.1088/0957-0233/25/4/044003
Web URLhttp://iopscience.iop.org/article/10.1088/0957-0233/25/4/044003/meta
LanguageEnglish

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