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SI traceable determination of the spring constant of a soft cantilever using a nanonewton force facility based on electrostatic methods

Nesterov, V. (PTB, Braunschweig, Germany), Belai, O. (Novosibirsk, Russia), Nies, D. (PTB, Braunschweig, Germany), Buetefisch, S. (PTB, Braunschweig, Germany), Muelelr, M. (PTB, Braunschweig, Germany), Ahbe, T. (PTB, Braunschweig, Germany), Neparty, D. (PTB, Braunschweig, Germany), Popadic, R. (PTB, Braunschweig, Germany) and Wolff, H. (PTB, Braunschweig, Germany)
Keywords:

Nanonewton force facility Spring constant Soft cantilever Contact potential SI-traceable determination

Document typeArticle
Journal title / SourceMetrologia
Peer-reviewed articleYes
Volume53 (2016)
Issue4
Page numbers / Article number1031-1044
Publisher's nameIOP Publishing Ltd.
Publisher's address (city only)Bristol
Publication date 2016-08-1
ISSN0026-1394 (print) ; 1681-7575 (online)
DOI10.1088/0026-1394/53/4/1031
Web URLhttp://www.ingentaconnect.com/content/iop/met/2016/00000053/00000004/art01031
LanguageEnglish

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