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Good Practice Guide “Elastic property measurement of nanobeams by cantilever force measurement inside a Scanning Electron Microscope”

Wollschläger, N. (BAM, Berlin, Germany) and Österle, W. (BAM, Berlin, Germany)
Keywords:

Cantilever, SEM

Document typeGood Practice Guide
Issue2015
Publication date 2015-11
Web URLhttp://www.ptb.de/emrp/2618.html
LanguageEnglish

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