Welcome to the EURAMET Repository Link

The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Characterization of High-k Nanolayers by Grazing Incidence X-ray Spectrometry

Muller, M. (Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany), Honicke, P. (Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany), Detlefs, B. (CEA Laboratory of Electronics and Information Technologies (LETI), Minatec Campus, 17 rue des Martyrs, 38054 Grenoble, France) and Fleischmann, C. (Imec, Kapeldreef 75, BE-3001 Leuven, Belgium)

GIXRF; layer thickness; gate stack; reference-free analysis, ALD

Document typeArticle
Journal title / SourceMaterials
Peer-reviewed articleYes
Page numbers / Article number3147-3159
Publisher's nameMDPI
Publisher's address (city only)Basel Switzeland
Publication date 2014-04-17
Web URLhttp://www.mdpi.com/1996-1944/7/4/3147

Back to the list view