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Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer

Seppä, J (Ctr. for Metrology and Accreditation (Finland)), Kassamakov, I (Ctr. for Metrology and Accreditation (Finland)), Nolvi,, A (Ctr. for Metrology and Accreditation (Finland)), Heikkinen, V (Ctr. for Metrology and Accreditation (Finland)), Paulin, T (Ctr. for Metrology and Accreditation (Finland)), Hao, L (NPL, Teddington, UK), Lassila, A (Ctr. for Metrology and Accreditation (Finland)) and Hæggsröm, E (Ctr. for Metrology and Accreditation (Finland))

stroboscopic scanning light interferometer, M(N)EMS devices, Interferometers ; Calibration ; Scanning ; Transducers ; Mirrors ; Equipment and services ; Heterodyning ; Lasers ; Light sources ; Metrology

Document typeProceeding
Journal title / SourceProceedings of Society of Photo Optical Instrumentation Engineers
Peer-reviewed articleYes
Page numbers / Article number87883J
Publisher's nameSPIE
Publisher's address (city only)n/a
Publication date 2013-05-13
Conference nameOptical Measurement Systems for Industrial Inspection VIII
Conference date13-05-2013
Conference placeMunich, Germany
Web URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1687502

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