Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer
Seppä, J (Ctr. for Metrology and Accreditation (Finland)), Kassamakov, I (Ctr. for Metrology and Accreditation (Finland)), Nolvi,, A (Ctr. for Metrology and Accreditation (Finland)), Heikkinen, V (Ctr. for Metrology and Accreditation (Finland)), Paulin, T (Ctr. for Metrology and Accreditation (Finland)), Hao, L (NPL, Teddington, UK), Lassila, A (Ctr. for Metrology and Accreditation (Finland)) and Hæggsröm, E (Ctr. for Metrology and Accreditation (Finland))stroboscopic scanning light interferometer, M(N)EMS devices, Interferometers ; Calibration ; Scanning ; Transducers ; Mirrors ; Equipment and services ; Heterodyning ; Lasers ; Light sources ; Metrology
Document type | Proceeding |
Journal title / Source | Proceedings of Society of Photo Optical Instrumentation Engineers |
Peer-reviewed article | Yes |
Volume | 8788 |
Issue | n/a |
Page numbers / Article number | 87883J |
Publisher's name | SPIE |
Publisher's address (city only) | n/a |
Publication date | 2013-05-13 |
Conference name | Optical Measurement Systems for Industrial Inspection VIII |
Conference date | 13-05-2013 |
Conference place | Munich, Germany |
ISSN | n/a |
DOI | 10.1117/12.2020525 |
ISBN | n/a |
Web URL | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1687502 |
Language | English |