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Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer

Seppä, J (Ctr. for Metrology and Accreditation (Finland)), Kassamakov, I (Ctr. for Metrology and Accreditation (Finland)), Nolvi,, A (Ctr. for Metrology and Accreditation (Finland)), Heikkinen, V (Ctr. for Metrology and Accreditation (Finland)), Paulin, T (Ctr. for Metrology and Accreditation (Finland)), Hao, L (NPL, Teddington, UK), Lassila, A (Ctr. for Metrology and Accreditation (Finland)) and Hæggsröm, E (Ctr. for Metrology and Accreditation (Finland))

Keywords:

stroboscopic scanning light interferometer, M(N)EMS devices, Interferometers ; Calibration ; Scanning ; Transducers ; Mirrors ; Equipment and services ; Heterodyning ; Lasers ; Light sources ; Metrology


Document type	Proceeding
Journal title / Source	Proceedings of Society of Photo Optical Instrumentation Engineers
Peer-reviewed article	Yes
Volume	8788
Issue	n/a
Page numbers / Article number	87883J
Publisher's name	SPIE
Publisher's address (city only)	n/a
Publication date	2013-05-13
Conference name	Optical Measurement Systems for Industrial Inspection VIII
Conference date	13-05-2013
Conference place	Munich, Germany
ISSN	n/a
DOI	10.1117/12.2020525
ISBN	n/a
Web URL	http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1687502
Language	English

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