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In-situ determination of the spring constant of AFM cantilevers using a MEMS nanoforce transducer

Gao, S. (PTB), Brand, U. (PTB) and Li, Z. (PTB)
Keywords:

Atomic force microscope (AFM), Cantilever calibration, Nano-force transducer

Document typeProceeding
Journal title / SourceProceedings of the 14th international conference of the european society for precision engineering and nanotechnology
VolumeI
Page numbers / Article numberP4.11, 205V1
Publisher's nameSieca Repro
Publisher's address (city only)Delft
Publication date 2015
Conference name14th international conference of the european society for precision engineering and nanotechnology
Conference dateJune 2-6, 2014
Conference placeDubrovnik, Croatia
ISBN14: 978 - 0 - 9566790 - 3 - 1
LanguageEnglish

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